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Flexible Cleanroom


The Flexible Cleanroom is a ~ 2000 square foot class 100 cleanroom facility on the first floor of the Spilker Building, supporting photolithography, wet etching, chemical processing, rapid thermal annealing, plasma cleaning, sample preparation, liftoff, chemical etching, thickness measurement, characterization, probing, testing, precision cleaning, optical assembling, delicate assembly work, etc. The lab is flexible in the sense that we work with many odd materials which are generally banned in a rigid CMOS type of facility, and we generally work with smaller chips, crystals, polymers, micro-machined devices, etc. Lab users pay a daily fee when they want to access the lab. The fee is to cover costs such as cleanroom supplies, repairs and maintenance of equipment, gases, chemicals, cleanroom apparel, etc. The following lists equipment available inside the cleanroom:

  • Mask Aligner: Quintel Q4000
  • Litho: ML3 Direct Write System
  • Deposition: Oerlikon Univex 400 DC/RF sputter station
  • Milling: Intlvac Nanoquest Ion Mill
  • Profilometer: KLA Tencor Alpha-Step D-500
  • March Instruments PX-250 Plasma Asher
  • Rapid Thermal Annealer: AG Associates Heatpulse 210
  • Benches: Acid, Base, Solvent, Spinner
  • Spinner: Headway Research
  • Spinner: Laurell WS-650MZ
  • Oven: Blue M Ovens (6), 260 C max
  • Oven: Precision 31468 Vacuum Oven
  • Hotplates
  • Ultrasonic Cleaner
  • Flip Chip Bonder: Research Devices M8
  • Loctite UV Exposure Tool m/n7411-S
  • Digital Scale
  • Reflow Chamber
  • Probe Station: Micromanipulator Co. Model 6000
  • Probe Station: Suss Microtec PM5
  • Microscope: Olympus BH
  • Microscope: Olympus BH2
  • Microscope: Leitz
  • Microscope: Wild Stereo
  • Refrigerator: VWR Flammable Storage
  • Gramatech Vacuum Bag Sealer


Triple Hotplate: This custom triple resist hotplate was designed and built by Tom Carver.  It is for baking resist, PMMA, e-beam resist, SU-8, and other spin-on polymers.  The precision flat surface is coated with Teflon.  The surface temperature is very uniform and accurate.  It is not to be used at higher than 220C.   The aluminum sheet metal squares shown are for baking polymers which are not easily removed with solvents once baked (SU-8, polyimide, PDMS, etc.)


Contact Information

Tom Carver
(650) 723-1861 or (650) 725-9183


Research Examples

Congruent lithium niobate wafer with segmented electrodes: A three-inch-diameter magnesium-doped lithium niobate (Mg:LN) wafer patterned with 18-um pitch variable duty-cycle gratings arranged in a hexagonal pattern to allow for 19 independent material characterization experiments. A plexiglass fixture with 19 independent hexagonally-arranged high-voltage electrodes to allow for electric-field domain reversal of ferroelectric materials. The fixture was designed by Carsten Langrock and Tom Carver. Credit: Carsten Langrock (Fejer Group, Stanford)


Intravenous Imaging of Arteries: The device consists of a ring of transducers with associated electronics, all mounted on the tip of a catheter with a hollow core. Equipment used within Flexible Cleanroom: flip chip bonder, reflow oven chamber, wet benches, inspection tools. Credit: Azadeh Moini (Khuri-Yakub Group, Stanford)



Getting Started

In order to become a qualified user of the Flexible Cleanroom, you need to follow each of these steps in the order as listed here: