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Nanopatterning Cleanroom

Overview

The Nanopatterning Cleanroom is hosting the JEOL 6300FS eBeam, an FEI Nava NanoSEM, Agilent AFM, wet benches, optical microscopes and other supporting equipment. The cleanroom is located in the basement of the Spilker Building.

Contact Information

Cliff Knollenberg
(650) 723-1675

Comments/Suggestion about the Cleanroom can also be shared using this form.

 

Getting Started

In order to become a qualified user of the cleanroom or any tools within, you need to follow each of these steps in the order as listed here:

Equipment

A range of smaller equipment and capabilities exist within the Nanopatterning Cleanroom. The following gives a short description of the instruments.

Keyence VK-X Series 3D Laser Scanning Confocal Microscope: The Keyence VK-X Series 3D Laser Scanning Confocal Microscope provides non-contact, nanometer-level profile, roughness, and film thickness data on any material. The lateral resolution of the microscope is 120 nm using the 408 nm Violet laser light. The microscope scans the surface using a 16-bit photomultiplier to receive the reflected laser light. The instrument is able to provide highly accurate 3D measurement data over any shape of materials and steep angles (up to 88 Degree angle of detection). High-resolution optical images can be acquired with resolutions up to 21.6 million pixels through 3CCD pixel shifting technology. High dynamic range (16-bit resolution color gradation) function automatically recognizes bright and dark areas as well as low contrast areas.

KLA Tencor D-100 Alpha Step: The KLA Tencor D-100 Alpha Step is a needle profilometer capable of quickly and accurately measuring feature heights on a surface.  With noise levels approaching 3-5nm it capable of resolving step heights as small as 10nm.  Variable force and measurement length settings make measurements possible on a wide range of materials and structures.  A magnified video targeting system permits positioning the needle tip near small surface features.

UV Ozone Cleaner: The UV Ozone Cleaner uses a UV light source to generate ozone molecules.  The ozone molecules react and volatilize molecules that have absorbed onto the surface of samples.  This provides a gentle method for cleaning sample surfaces immediately prior to subsequent processing steps.

FilMetrics F20: The FilMetrics F20 uses spectral reflectance to accurately measure the thickness of thin film layers. It can be used with a variety of materials including semiconductors, dielectrics, photoresists, and some metal thin films.  In the SNP cleanroom it is especially useful for measuring the thickness of e-beam resist layers prior to e-beam writing.  A library of indexes of refraction and Cauchy coefficients can be updated and expanded for new materials.

Film Sense FS-1 Ellipsometer: The Film Sense FS-1 Multi-Wavelength Ellipsometer provides fast and reliable thin film measurements. The film thickness of most transparent thin films from 0 – 1000 nm can be determined. Optical constants, n & k, and other film properties can also be measured for many samples.

Vacuum Sealer:The Vacuum Sealer allows lab users to quickly and cleanly seal their samples in plastic bags prior to transport outside the lab.

Optical Inspection Microscopes: Optical microscopes enable visual inspection of samples with up to 100x objectives.  Dark field objectives to 20x permit inspection of some nanoscale features not visible in BF.  Image capture software is available on an adjacent computer.

Cressington Sputter Coater: The Cressington 108 Auto Sputter Coater is used for coating samples with a thin layer of a conductive metal film. These layers are typically used to dissipate electrical charge from non-conductive samples placed in SEMs and e-beam writing tools. Our tool sputter deposits a fine grained AuPd alloy compatible with high resolution SEM imaging. We also have pure Au targets available for installation upon request.