Stanford Nano Shared Facilities | Stanford University

The Spilker Building is home to two class 100 cleanrooms:

A range of equipment and capabilities exists in each of the cleanrooms. The following lists the tools available:

Instrument	Location
e-beam: JEOL 6300-FS	Nanopatterning Cleanroom	650-723-8586
e-beam: Raith Voyager	Nanopatterning Cleanroom	650-723-8586
e-beam/SEM: FEI Nova	Nanopatterning Cleanroom	650-723-8587
litho: ML3 Direct Write	Flexible Cleanroom
deposition: KJL Evaporator	Nanopatterning Cleanroom
deposition: Oerlikon Univex Sputter	Flexible Cleanroom
deposition: Big Evaporator - Service	Flexible Cleanroom
deposition: Small Evaporator - Service	Flexible Cleanroom
milling: Intlvac Ion Mill	Flexible Cleanroom
RIE: Oxford PlasmaPro 80	Nanopatterning Cleanroom
Profilometer: KLA Tencor Alpha Step D-500	Flexible Cleanroom
Microscopy: Keyence VK‐X 3D Laser Confocal	Nanopatterning Cleanroom
Microscopy: Nikon LV100ND	Nanopatterning Cleanroom Flexible Cleanroom
Wet Benches	Nanopatterning Cleanroom
General Equipment	Nanopatterning Cleanroom
Westbond Wirebonder	Spilker 008
3D Printer	Spilker 008
Microfab Shop	Flexible Cleanroom

SNSF: Nanofabrication