SEM: Zeiss Gemini 560 Scanning Electron Microscope
Overview
ZEISS GeminiSEM stands for effortless imaging with sub-nanometer resolution. These FE-SEMs (field emission scanning electron microscope) combine excellence in imaging and analytics. Innovations in electron optics and a new chamber design let you benefit from better image quality, usability and flexibility. The Gemini 560 utilizes the Gemini 3 column. It includes the Nano-twin lens and the new electron optical engine Smart Autopilot.
Available detectors include Chamber ETSE (Everhart-Thornley), in-lens SE, in-lens EsB, and retractable segmented BSD. Stage features 130 mm x 130 mm range of movement. Airlock transfer allows up to 4 inch wafers, and anything larger can be loaded through the chamber door.
Atlas 5 software package for correlative microscopy and automated stitching and image taking capability.
Under consideration: Raith ELPHY EBL attachment or comparable for low-kV EBL; GenISys InSpec for additional automated image taking and analysis functionality.
Installation Timeline (Subject to Change)
| February 3, 2025 (to be confirmed) | Nova NanoSEM Decommission |
| February 10, 2025 | Zeiss Gemini 560 SEM Delivery |
| February 11 - 14, 2025 | Gemini 560 Installation |
| February 18, 2025 | Staff Training |
| February 19 - 28, 2025 | Staff Testing and Additional Setup |
| March 3, 2025 (anticipated) | Begin User Trainings for NovaSEM Users |
| March 31, 2025 (anticipated) | Begin New User Trainings |