SEM: Zeiss Gemini 560 Scanning Electron Microscope
Overview
ZEISS GeminiSEM stands for effortless imaging with sub-nanometer resolution. These FE-SEMs (field emission scanning electron microscope) combine excellence in imaging and analytics. Innovations in electron optics and a new chamber design let you benefit from better image quality, usability and flexibility. The Gemini 560 utilizes the Gemini 3 column. It includes the Nano-twin lens and the new electron optical engine Smart Autopilot.
Available detectors include Chamber ETSE (Everhart-Thornley), in-lens SE, in-lens EsB, and retractable segmented BSD. Stage features 130 mm x 130 mm range of movement. Airlock transfer allows up to 4 inch wafers, and anything larger can be loaded through the chamber door.
Additional features and software:
- Atlas 5 software package for correlative microscopy and automated stitching and image taking capability.
- GenISys InSpec for additional automated image taking and analysis functionality.
- GenISys ProSEM for offline image analysis and metrology.
Under consideration: Raith ELPHY EBL attachment or comparable for low-kV EBL
Installation Timeline (Subject to Change)
| February 3, 2025 | Nova NanoSEM Decommission |
| February 10, 2025 | Zeiss Gemini 560 SEM Delivery |
| February 11 - 14, 2025 | Gemini 560 Installation |
| February 18, 2025 | Staff Training |
| February 19 - 28, 2025 | Staff Testing and Additional Setup |
| February 27, 2025 | Begin User Trainings for NovaSEM Users |
| March 25 - 27, 2025 | GenISys InSpec Attachment Installation Zeiss SEM will be unavailable during this time |
| April 21, 2025 (anticipated) | Begin New User Trainings |
Contact Information
nano-gemini-staff@lists.stanford.edu
Chris Lung
Grant Shao
Getting Started and Training Information
We will start with training existing users of at least one the SNSF Nova, Apreo, Helios, or Magellan SEMs. You must also be an active SNSF and NPC user. To sign up for a training, please see the email sent to nova-users@lists.stanford.edu on February 24th, or please email nano-gemini-staff@lists.stanford.edu to request training.
Once new user trainings are available, the information will be posted here.
Additional training sessions are required after the basic training for the following features:
- Stage tilting
- Backscatter imaging (aBSD and EsB detectors)
- GenISys InSpec (pending installation)
Auto-disqualification: Badger will auto-disqualify you on the Zeiss Gemini 560 SEM if you do not use it in a 2 year period. This is to keep an up-to-date record of active, qualified users on the Zeiss Gemini 560 SEM in Badger. To get re-qualified (re-training not necessarily required), please email nano-gemini-staff@lists.stanford.edu.
Resources
SEM specific to SNSF Nanopatterning Cleanroom:
Gemini 560 - Quick Guide
Gemini 560 - Troubleshooting Guide [Work In Progress]
Online SEM edX course, from Nano@Stanford. The SEM module is located under Microscopy. Note: Do not take the quiz in the module, take the quiz for NPC in the link above.
MyScope: Scanning Electron Microscopy:
Select the Scanning Electron Microscope icon. The Practical tab has an SEM simulator you can try.