SEM: Zeiss Gemini 560 Scanning Electron Microscope

Jump To: Overview | Installation Timeline | Contact Information | Getting Started and Training Information | Resources

Overview

ZEISS GeminiSEM stands for effortless imaging with sub-nanometer resolution. These FE-SEMs (field emission scanning electron microscope) combine excellence in imaging and analytics. Innovations in electron optics and a new chamber design let you benefit from better image quality, usability and flexibility. The Gemini 560 utilizes the Gemini 3 column. It includes the Nano-twin lens and the new electron optical engine Smart Autopilot.

Available detectors include Chamber ETSE (Everhart-Thornley), in-lens SE, in-lens EsB, and retractable segmented BSD. Stage features 130 mm x 130 mm range of movement. Airlock transfer allows up to 4 inch wafers, and anything larger can be loaded through the chamber door.

Additional features and software:

• Atlas 5 software package for correlative microscopy and automated stitching and image taking capability.
• GenISys InSpec for additional automated image taking and analysis functionality.
• GenISys ProSEM for offline image analysis and metrology.

Under consideration: Raith ELPHY EBL attachment or comparable for low-kV EBL

Installation Timeline (Subject to Change)

Contact Information

nano-gemini-staff@lists.stanford.edu
Chris Lung
Grant Shao

Getting Started and Training Information

In order to become a qualified user of the Zeiss Gemini 560 SEM, you need to follow each of these steps in the order as listed here:

1. Complete the process to become a lab member of SNSF and follow the instructions to activate a Badger account.
2. Complete the process to become a Nanopatterning Cleanroom user.
3. Review the material in the Resources section below and in the online SEM edX course, from Nano@Stanford. The SEM module is located under Microscopy. Note: Do not take the quiz in the module, take the quiz for NPC in the link below.
4. Pass (80%) and complete the Gemini SEM Review Quiz and New User Intake Form. An email is automatically sent to both you and staff once you have completed the form.
5. Staff will reach out to schedule one-on-one in-person training sessions.
   • Basic trainings is typically two 2-hour training sessions. The 1st session will be done with a standard SNSF staff sample, and basic interface and operations will be explained. The 2nd session will be done on your own sample, with you largely driving the SEM under staff supervision. The 2nd session must be scheduled within a month of the 1st session, otherwise the 1st session may need to be repeated.
   • In very specific cases, the two sessions can be combined in one session for users with prior SEM experience, conducted on your own sample. This is determined on a case-by-case basis and up to staff discretion.

Additional / Advanced Trainings

The following additional or advanced feature trainings can be scheduled after you are a qualified user. These trainings are typically done on your own sample(s). To request for a training, submit the Gemini SEM - Additional / Advanced Training Request Form.

• User interface and macro customization
• Loading through the chamber door (for samples / mounts that are taller than 20 mm or wider than 110 mm)
• Tilting (stage or pre-tilt mounts)
• Backscatter electron imaging (aBSD and EsB detectors) - available after April 21st.
• Any other specific features you'd like assistance with

Auto-disqualification: Badger will auto-disqualify you on the Zeiss Gemini 560 SEM if you do not use it in a 2 year period. This is to keep an up-to-date record of active, qualified users on the Zeiss Gemini 560 SEM in Badger. To get re-qualified (re-training not necessarily required), please email nano-gemini-staff@lists.stanford.edu.

Resources

SEM specific to SNSF Nanopatterning Cleanroom: 
Gemini 560 - Quick Guide
Gemini 560 - Troubleshooting Guide [Work In Progress]

Online SEM edX course, from Nano@Stanford. The SEM module is located under Microscopy. Note: Do not take the quiz in the module, take the quiz for NPC in the link above.

MyScope: Scanning Electron Microscopy: 
Select the Scanning Electron Microscope icon. The Practical tab has an SEM simulator you can try.