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WLI: Zygo NewView 9000 White Light Interferometer

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Overview

The NewView™ 9000 is a high-performance 3D optical surface profiler engineered for maximum versatility in non-contact surface characterization. It provides sub-nanometer vertical precision across the full magnification range, with high speed and reliability. The system accommodates diverse sample geometries — smooth, rough, flat, sloped, and stepped — all without sample preparation. High-speed acquisition, a large high-sensitivity 1.9 MP sensor, automated focus/tools, and robust vibration immunity ensure efficient and repeatable metrology even in challenging environments. Flexible hardware configurations support manual or fully automated staging, and the triple-zoom turret allows optics to be tailored to user needs. Mx™ software provides complete control, analysis, and automation, enabling workflows from basic surface roughness to advanced thin-film analysis and complex 3D topographic mapping.

Features:

  • Motorized stage travel range: XY 150mm, Tilt ±3°
  • Motorized 3-position encoded zoom turret with 1.0X Zoom tube
  • Scanner: precision piezo drive with closed loop control & crash protection
  • Measurement techniques: 3D coherence scanning interferometry, SureScan technology, phase shifting interferometry

Research Examples

 

Getting Started and Training Information

The Zygo Newview 9000 is located in the Deep Lab, Education Hub Room B152

Please follow these steps to get trained on the NewView9000:

  1. Complete the process to become a member of nano@stanford and follow the instructions to activate a NEMO account. You must complete the safety training specified under the column "Spilker, Shriram, McCullough, Moore, Deep Lab"
  2. Join the mailing list newview-users.
  3. Complete the quiz to access the Deep Lab.
  4. Complete the training request form.
  5. Email nano-wlistaff@lists.stanford.edu with your availability in the next two weeks to coordinate the 1-hour basic training.
  6. Additional training in specific WLI techniques will be available on an as-needed basis following completion of the basic training.

Resources