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Shared Facilities
Stanford Nano Shared Facilities
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Equipment
Nanofabrication
Nanopatterning Cleanroom
EBL: Overview
EBL: EBPG 5200+
EBL: GenISys Software
IBL: Velion S
SEM: Zeiss Gemini 560
Deposition: KJL Evaporator
Etch: Oxford RIE
Profilometer: Dektak XT-S Profiler
Reflectometry: Filmetrics F40
Microscopy: Keyence Laser Confocal
Microscopy: Nikon Optical
Microscopy: EVO Cam II
General Equipment
Wet Benches
Flexible Cleanroom
Litho: ML3 Direct Write
Deposition: Sputter
Etch: Intlvac Ion Mill
Profilometer: KLA Tencor Alpha Step
Microscopy: Nikon Optical
Microscopy: EVO Cam II
Asher: Plasma Asher
UV Cure: Cool Cure and Open Cure
Oven: Hi-Vac Oven
Wire Bonder
3D Printer
Electron & Ion Microscopy
SEM: TFS Apreo
SEM: FEI Magellan
SEM: Hitachi TM4000+
SEM: Ion Mill
SEM/FIB: FEI Helios
SEM/FIB: TFS Hydra PFIB
SEM: Sample Coating Service
TEM: TFS Spectra 300
TEM: FEI Titan
Imaging Request
PIPS Sign Up Calendar
TEM: FEI Tecnai
Imaging Request
PIPS Sign Up Calendar
TEM: Sample Prep
TEM: Specimen Holders
X-ray & Surface Analysis Facilities
XRD: Empyrean
XRD: X'Pert 2
XRD: Multiwire Laue
XRD: D8 Venture
XCT: Versa X-ray CT
Auger: PHI 700
XPS: VersaProbe 3
XPS: VersaProbe 4
PESA: Photoelectron Spectrometer
SIMS: NanoSIMS
SPM: Park FX-40
SPM: Park NX-10
SPM: Bruker Icon
SPM: Bruker IconIR
Horiba LabRAM Raman
Horiba XploRA+ Raman
Microscopy: EVO Cam II
Soft & Hybrid Materials Facility
Research Examples
Getting Started and Training Information
Equipment Descriptions
Lab Member Resources
SNSF Events
Staff Resources
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DENSsolutions Climate 3+ Holder
Gas Cell
TEM Holders
Double-Tilt,
Gas Cell
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