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Stanford Nano
Shared Facilities
Stanford Nano Shared Facilities
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Equipment
Nanofabrication
Nanopatterning Cleanroom
EBL: Overview
EBL: EBPG 5200+
EBL: GenISys Software
IBL: Velion S
SEM: Zeiss Gemini 560
Deposition: KJL Evaporator
Etch: Oxford RIE
Profilometer: Dektak XT-S Profiler
Reflectometry: Filmetrics F40
Microscopy: Keyence Laser Confocal
Microscopy: Nikon Optical
Microscopy: EVO Cam II
General Equipment
Wet Benches
Flexible Cleanroom
Litho: ML3 Direct Write
Deposition: Sputter
Etch: Intlvac Ion Mill
Profilometer: KLA Tencor Alpha Step
Microscopy: Nikon Optical
Microscopy: EVO Cam II
Asher: Plasma Asher
UV Cure: Cool Cure and Open Cure
Oven: Hi-Vac Oven
Wire Bonder
3D Printer
Electron & Ion Microscopy
SEM: TFS Apreo
SEM: FEI Magellan
SEM: Hitachi TM4000+
SEM: Ion Mill
SEM/FIB: FEI Helios
SEM/FIB: TFS Hydra PFIB
SEM: Sample Coating Service
TEM: TFS Spectra 300
TEM: FEI Titan
Imaging Request
PIPS Sign Up Calendar
TEM: FEI Tecnai
Imaging Request
PIPS Sign Up Calendar
TEM: Sample Prep
TEM: Specimen Holders
X-ray & Surface Analysis Facilities
XRD: Empyrean
XRD: X'Pert 2
XRD: Multiwire Laue
XRD: D8 Venture
XCT: Versa X-ray CT
Auger: PHI 700
XPS: VersaProbe 3
XPS: VersaProbe 4
PESA: Photoelectron Spectrometer
SIMS: NanoSIMS
SPM: Park FX-40
SPM: Park NX-10
SPM: Bruker Icon
SPM: Bruker IconIR
Horiba LabRAM Raman
Horiba XploRA+ Raman
Microscopy: EVO Cam II
Soft & Hybrid Materials Facility
Research Examples
Getting Started and Training Information
Equipment Descriptions
Lab Member Resources
SNSF Events
Staff Resources
Main content start
Gatan PIPS II
Ion Polishing
Goal
(S)TEM
Sample Prep
Ion Polishing
Sample Type
Metal,
Semiconductor
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