Reflectometry: Filmetrics F40
Overview
The Filmetrics F40 is used to measure the thickness and optical constants (n and k) of transparent thin films. The F40 uses a microscope to provide a square measurement spot size as small as 1 micron. The F40 comes complete with an integrated color video camera that allows exact monitoring of the film thickness measurement spot. Thickness and index can be measured in less than a second. Measured films must be optically smooth and within the 20 nm - 40 um in thickness. Commonly measured films include semiconductor process films such as oxides, nitrides, resists, and polysilicon, optical coatings such as hardness and anti-reflection coatings, flat panel display films such as polyimides, resist, and cell gaps, and the various coatings used in CD and DVD manufacture. Films that cannot be measured include very rough films and opaque films.
The F40 is currently set up with a 15X objective lens and a 100 um aperture for a 7 um spot size. It is on a motorized vacuum stage connected to the FILMapper software, allowing for 2D and 3D mapping of film thickness across your sample.
Getting Started and Training Information
In order to become a qualified user of the Filmetrics F40, you need to follow each of these steps in the order as listed here:
- Complete the process to become a lab member of SNSF and follow the instructions to activate a Badger account.
- Complete the process to become a Nanopatterning Cleanroom user.
- Email Grant Shao (shaog@stanford.edu) to schedule a 1 hour training session. You are encouraged but not required to bring your own sample(s) to the session.
Auto-disqualification: Badger will auto-disqualify you on the Filmetrics F40 if you do not use it in a 3 year period. This is to keep an up-to-date record of active, qualified users on the Filmetrics F40 in Badger. To get re-qualified (re-training not required), please email nano-snpcleanroom-staff@lists.stanford.edu.