Skip to main content Skip to secondary navigation

Facilities & Equipment

Main content start
Student working with staff member at the JEOL electron beam lithography tool.

Nanofabrication

The Spilker building is home to our two cleanroom facilities, featuring electron beam lithography, deposition, etching and a range of other tools to enable nanofabrication.

 

Student working at Titan transmission electron microscope.

Electron & Ion Microscopy

The Electron & Ion Microscopy facilities feature some of the most advanced tools for Scanning Electron Micoscopy (SEM), Transmission Electron Microscopy (TEM) and Focused Ion Beam (FIB).

Lauren Riddiford, a graduate student in applied physics uses the XPS (x-ray photoelectron spectroscopy) tool by PHI, which is located in the McCullough building, room 112 and is part of Stanford Nano Shared Facilities. XPS gives quantitative elemental composition information on a wide variety of samples.

X-ray & Surface Analysis

At the core of the XSA facilities are X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), NanoSIMS and a range of other Scanning Probe Micoscopy capabilites.

At soft & sybrid materials

Soft & Hybrid Materials Facility

SMF is dedicated to fundamental research on interfaces found in systems containing polymers and low molecular weight amphiphiles.