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Microfabrication Shop

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The Microfab Shop, located in Spilker Room 128A, provides thin film coating services on an hourly basis for Stanford researchers. This includes e-beam evaporation from two different customized evaporation stations, and RF and DC sputter deposition from a three-magnetron sputter station using 3” sputter targets and a heatable, rotatable substrate mounting stage. With a large number of custom designed mounting fixtures and tooling, the shop is able to accommodate a wide range of sizes and shapes of substrates, and is able to do specialized angled and angled rotational depositions, and super thin films as thin as 1 Angstrom occasionally. The Microfab Shop also provides consultation on process development and troubleshooting, design of tooling and fixtures, mechanical design, and electronic design. The Microfab Shop also offers consultation related to acoustic transducer fabrication, mold making, casting of PDMS, polyurethane and other resins, specialized epoxy bonding, and other fabrication techniques. The Microfab Shop's services are open only to Stanford researchers (not to industrial users). All users of the Microfab Shop's services must set up a Badger account with SNSF. Feel free to call, email, or come by to talk in person to discuss your needs.

Contact Information

Tom Carver
650 723-1861 or (650) 725-9183

Research Examples

Five 4" silicon wafers freshly coated with Ti/Au by electron beam gun evaporation.
Mold design and fabrication, and precision casting of PDMS acoustic lenses for capacitive micromachined ultrasonic transducers (CMUTs), for Kamyar Firouzi of Prof. Khuri-Yakub's group.

Getting Started

In order to become a qualified customer of the Microfab Shop, you need to follow each of these steps in the order as listed here:

  1. Complete the process to become an internal lab member of SNSF and follow the instructions to activate a Badger account.
  2. Complete a work requisition.

Important notice to our External Users: The Microfab Shop is not available to external users.