SEM: FEI Nova NanoSEM 450 Scanning Electron Microscope
Overview
The FEI Nova NanoSEM line of SEMs provides high-quality nanoscale research tools for a variety of applications that involve sample characterization, analysis, nanoprototyping, and S/TEM sample preparation. More samples, including the most non-conducting or contaminating materials, can equally be characterized or analyzed in the Nova NanoSEM 50 series, using its unique low vacuum capabilities. Characterization in low vacuum extends all the way up to ultra-high resolution, thanks to FEI's Helix detector technology. Small and large samples can easily be accommodated inside the large chamber, on the Nova NanoSEM's high precision, high stability stages. In addition, a high definition camera and a correlative navigation unit help to find and move to the right region of interest in no time. The Nova NanoSEM 450's sample stage features a 100 x 100 mm range of movement with holders for small pieces up to 4 inch wafers.
Pattern generation with the Nova NanoSEM has been decommissioned and is no longer available. For electron-beam lithography options, please refer to the EBL: Overview page. For nanoprototyping, the Nova NanoSEM 50 series offers the most extensive set of integrated tools, including a 16-bit on-board digital pattern generator and dedicated patterning software, a high speed electrostatic beam blanker and gas injection systems for direct electron beam writing of nanostructures.
Getting Started and Training Information
The FEI Nova NanoSEM will be decommissioned in the week of February 3rd, 2025. No further trainings on the Nova SEM will be offered. The new Zeiss Gemini 560 SEM is expected to be installed early February 2025, with new user trainings starting sometime in March 2025. Any additional questions, please email nano-nova-staff@lists.stanford.edu.
If you require SEM capability in the meantime, please see the TFS Apreo SEM or the Zeiss Merlin SEM.
Auto-disqualification: Badger will auto-disqualify you on the FEI Nova NanoSEM if you do not use it in a 2 year period. This is to keep an up-to-date record of active, qualified users on the FEI Nova NanoSEM in Badger. To get re-qualified (re-training not necessarily required), please email nano-nova-staff@lists.stanford.edu.
Resources
SEM specific to SNSF Nanopatterning Cleanroom:
Nova NanoSEM - Standard Operating Procedure
Nova NanoSEM - Quick Guide
Nova NanoSEM - Troubleshooting Guide
FEI Best Practices - Stage Bias / Beam Deceleration
FEI Application Note - Concentric BackScatter Detector (CBS)
Online SEM edX course, from Nano@Stanford. The SEM module is located under Microscopy. Note: Do not take the quiz in the module, take the quiz for NPC in the link above.
MyScope: Scanning Electron Microscopy:
Select the Scanning Electron Microscope icon. The Practical tab has an SEM simulator you can try.