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Stanford SNSF
Stanford Nano Shared Facilities
Stanford Nano Shared Facilities
Student working with staff member at the JEOL electron beam lithography tool.

Nanofabrication

The Nanofabrication facilities feature two 2000 square feet class 100 cleanrooms located within the Spilker Building. Advanced electron beam lithography, SEM, physical vapor deposition and ion beam milling are examples of the capabilities available for nanofabrication.

The Spilker Building is home to two class 100 cleanrooms:

Cleanroom Facilities Locations
Nanopatterning Cleanroom Spilker Basement
Flexible Cleanroom Spilker 1st floor

A range of equipment and capabilities exists in each of the cleanrooms. The following lists the tools available:

Instrument Location  
EBL: JEOL 6300-FS Nanopatterning Cleanroom 650-723-8586
EBL: Raith VOYAGER Nanopatterning Cleanroom 650-723-8586
EBL/SEM: FEI Nova SEM Nanopatterning Cleanroom 650-723-8587
Litho: ML3 Direct Write Flexible Cleanroom  
Deposition: KJL Evaporator Nanopatterning Cleanroom  
Deposition: Oerlikon Univex Sputter Flexible Cleanroom  
Deposition: Big Evaporator - Service Only Flexible Cleanroom  
Deposition: Small Evaporator - Service Only Flexible Cleanroom  
Etch: Oxford PlasmaPro 80 RIE Nanopatterning Cleanroom  
Etch: Intlvac Ion Mill Flexible Cleanroom  
Profilometer: Dektak XT-S Stylus Profiler Nanopatterning Cleanroom  
Profilometer: KLA Tencor Alpha Step D-500 Flexible Cleanroom  
Microscopy: Keyence VK‐X 3D Laser Confocal Nanopatterning Cleanroom  
Microscopy: Nikon LV100ND Nanopatterning Cleanroom; Flexible Cleanroom  
Asher: March Instruments PX-250 Plasma Asher Flexible Cleanroom  
UV: American Ultraviolet Cool Cure UV Exposure Chamber Flexible Cleanroom  
Wet Benches Nanopatterning Cleanroom  
General Equipment Nanopatterning Cleanroom  
Westbond Wire Bonder Spilker 008  
3D Printer Spilker 008  
Microfabrication Shop Flexible Cleanroom