Nanofabrication

The Nanofabrication facilities feature two class 100 cleanrooms located within the Spilker Building. Advanced electron beam lithography, SEM, evaporator and ion beam milling are examples of the capabilities available for nanofabrication.

The Spilker Building is home to two class 100 cleanrooms:

Cleanroom Facilities	Locations
Nanopatterning Cleanroom	Spilker Basement
Flexible Cleanroom	Spilker 1st floor

A range of equipment and capabilities exists in each of the cleanrooms. The following lists the tools available:

Instrument	Location
EBL: JEOL 6300-FS	Nanopatterning Cleanroom	650-723-8586
EBL: Raith VOYAGER	Nanopatterning Cleanroom	650-723-8586
EBL/SEM: FEI Nova SEM	Nanopatterning Cleanroom	650-723-8587
Litho: ML3 Direct Write	Flexible Cleanroom
Deposition: KJL Evaporator	Nanopatterning Cleanroom
Deposition: Oerlikon Univex Sputter	Flexible Cleanroom
Deposition: Big Evaporator - Service Only	Flexible Cleanroom
Deposition: Small Evaporator - Service Only	Flexible Cleanroom
Etch: Oxford PlasmaPro 80 RIE	Nanopatterning Cleanroom
Etch: Intlvac Ion Mill	Flexible Cleanroom
Profilometer: Dektak XT-S Stylus Profiler	Nanopatterning Cleanroom
Profilometer: KLA Tencor Alpha Step D-500	Flexible Cleanroom
Microscopy: Keyence VK‐X 3D Laser Confocal	Nanopatterning Cleanroom
Microscopy: Nikon LV100ND	Nanopatterning Cleanroom; Flexible Cleanroom
Asher: March Instruments PX-250 Plasma Asher	Flexible Cleanroom
UV: American Ultraviolet Cool Cure UV Exposure Chamber	Flexible Cleanroom
Wet Benches	Nanopatterning Cleanroom
General Equipment	Nanopatterning Cleanroom
Westbond Wire Bonder	Spilker 008
3D Printer	Spilker 008
Microfabrication Shop	Flexible Cleanroom

Nanofabrication

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