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Stanford SNSF
Stanford Nano Shared Facilities
Stanford Nano Shared Facilities

Deposition: Kurt J. Lesker E-Beam Evaporator

Overview

We have a Kurt J. Lesker LAB 18 e-beam evaporator available in the Nanopatterning Cleanroom.

Key features:

  • Load-lock for cleanliness and faster pump down times (5-10 minutes per wafer).
  • Up to a single 6 inch wafer can be inserted into the deposition chamber. Smaller pieces and wafer fragments can also be mounted on the water cooled substrate puck.
  • An Ar ion source for cleaning the substrate immediately prior to metal deposition.
  • A substrate to e-gun source distance of 24 inches which reduces side wall accumulation for better liftoff results.
  • The substrate holder has tilt control which permits depositing materials at angles other than 90 degrees.
  • We allow gold (Au) in the chamber.
  • We allow wafers with patterned photo resists for lift-off processes.
  • We are currently avoiding evaporating magnetic metals (Fe and Co) for the sake of users working with superconductors.
  • It has 8 pockets for different materials. We currently allow the following materials: Ag, Al, Au, Cr, Cu, Ge, Hf, Nb, Ni, Pd, Pt, Sc, Ti, V. We will consider introducing additional materials based on user demand.
  • Please note that certain precious metals will be charged separately from the hourly usage of the instrument.

Research Examples

Lines written by the JEOL e-beam lithography system. Metal was deposited and then a lift-off process was used to remove the metal from the regions where the e-beam resist remained.
Cross shaped patterns of metal sandwiching an oxide layer. The metal was depositing in the Lesker Evaporator.

Getting Started and Training Information

In order to become a qualified user of the KJL evaporator, you need to follow each of these steps in the order as listed here:

  1. Complete the process to become a lab member of SNSF and follow the instructions to activate a Badger account.
  2. Complete the process to become a Nanopatterning Cleanroom user.
  3. Review the Resources section below for an introduction to physical vapor deposition and the KJL Evaporator, its capabilities, and how to operate it.
  4. Pass (100%) a quiz that reviews KJL Evaporator safety, limitations, and operation: KJL Evaporator Review Quiz.
  5. Complete the KJL Evaporator New User Intake Form (second part of the quiz above).
  6. Record your name and email down on the KJL Evaporator Training Calendar (sent to you by email after completing the New User Intake Form).
  7. Staff will reach out to schedule a one-on-one in-person training session. It is highly recommended to review the SOP and training videos prior to the training session.
  8. Ar Ion Source Attachment Training:
    • The normal KJL Evaporator training is a prerequisite to the Ar Ion Source training. If you had specified that you want to use the Ar ion source in the KJL Evaporator User Intake Form, NPC Staff will reach out to you to schedule a training time. If you did not specify that you want to use the Ar ion source in the User Intake Form, please email kjl-evaporator-staff@lists.stanford.edu to schedule a training time.
    • Users should bring their own sample(s) with which they plan on doing a deposition for the Ar ion source training session.

Auto-disqualification: Badger will auto-disqualify you on the KJL evaporator if you do not use it in a 1 year period. This is to keep an up-to-date record of active, qualified users on the KJL evaporator in Badger and to ensure users are aware of changes and updates to the evaporator. To get re-qualified (re-training not necessarily required), please email kjl-evaporator-staff@lists.stanford.edu.