Deposition: Big Evaporator (Microfab Shop only)
Based on an extensively modified NRC basic pumping station.
- Typical runs pumped to low 10^-7 Torr pressure range.
- 6-pocket Airco Temescal e-gun.
- CV-10 Airco Temescal power supply, 10KV, 10 amps maximum emission current.
- Inficon quartz crystal thickness monitor, with .01 Angstrom rate/thickness resolution.
- Granville Phillips ion gauge, thermocouple gauges.
- Varian Diffusion Pump.
- Water-Cooled Chevron Baffle.
- Liquid Nitrogen Cold Trap.
- Renewable Pellet Molecular Sieve in Fore-Line.
- Typical source to substrate distance 10-14” (25.4cm to 35.56cm), but in special circumstances, as close as 7” to as far as 16” (17.78cm to 40.64cm).
- Can accommodate numerous sizes and types of substrates, including, but not limited to:
- Up to two 6” wafers
- Up to five 4” wafers
- 4” and 5” squares (mask blanks)
- Microscope slides and cover slips of all sizes
- Up to five 3” wafers
- Up to nine 2” wafers
- Glass fibers
- Odd shaped substrates
- Small chips Crystals
- PZT transducers
- Cylinders Thin Polymer Films (PET, Kapton, etc.)
- Shadow-masked substrates
- Substrates Kapton-taped, or carbon-taped, to carrier wafers or slides
- Samples mounted using Apiezon W high vacuum wax
- Various substrate holder assemblies
Can mount samples at various angles from source
With extra setup time, can rotate samples at various deposition angles from source during run, at variable RPM (typically to get better sidewall coverage, but also for special purposes such as metallizing around a cylinder or into parabolic reflectors).
Have done rotating large cylinders, rotating fiber walls and tips, rotating cantilever AFM tip chips, multi-faceted tapered reflector assemblies, etc.
With extra setup time, can do in-situ tilt changes of samples during run with 180-degree swing.
I will help with design or design/fabrication of specialized tooling for odd or unusual substrates.
List of evaporation sources, with typical thickness ranges
(inquire about atypical thicknesses or materials not listed):
|Material||Typical Thickness Range [A]||Notes|
|Boron||not well characterized|
|Gold||0-10,000||extra materials usage charge|
|Iridium||0-500||extra materials usage charge|
|Magnesium||not well characterized|
|Magnesium Fluoride||0-250||done as a protective overcoat over fresh mirror coating|
|Magnesium Oxide||0-250||done as overcoat only|
|Molybdenum||0-1,000||refractory metal, goes down very hot|
|Niobium||0-1,000||refractory metal, goes down very hot|
|Palladium||0-800||extra materials usage charge|
|Platinum||0-800||extra materials usage charge|
|Rhenium||very limited supply|
|Silicon Monoxide||0-250||done as a protective overcoat over fresh mirror coating|
|Silicon Dioxide||0-250||done as a protective overcoat over fresh mirror coating|
|Tantalum||0-1,000||refractory metal, goes down very hot|
|Titanium Dioxide||0-250||done as a protective overcoat over fresh mirror coating|
|Tungsten||0-1,000||refractory metal, goes down very hot|
To have evaporations done for you as a service on this evaporator, you need to follow each of these steps in the order as listed here: