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Operations During COVID-19

Deposition: Big Evaporator (Microfab Shop only)

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Overview

Based on an extensively modified NRC basic pumping station.

Key Features:

  • Typical runs pumped to low 10^-7 Torr pressure range.
  • 6-pocket Airco Temescal e-gun.
  • CV-10 Airco Temescal power supply, 10KV, 10 amps maximum emission current.
  • Inficon quartz crystal thickness monitor, with .01 Angstrom rate/thickness resolution.
  • Granville Phillips ion gauge, thermocouple gauges.
  • Varian Diffusion Pump.
  • Water-Cooled Chevron Baffle.
  • Liquid Nitrogen Cold Trap.
  • Renewable Pellet Molecular Sieve in Fore-Line.
  • Typical source to substrate distance 10-14” (25.4cm to 35.56cm), but in special circumstances, as close as 7” to as far as 16” (17.78cm to 40.64cm).
  • Can accommodate numerous sizes and types of substrates, including, but not limited to:
  • Up to two 6” wafers
  • Up to five 4” wafers
  • 4” and 5” squares (mask blanks)
  • Microscope slides and cover slips of all sizes
  • Up to five 3” wafers
  • Up to nine 2” wafers
  • Glass fibers
  • Odd shaped substrates
  • Small chips Crystals
  • PZT transducers
  • Cylinders Thin Polymer Films (PET, Kapton, etc.)
  • Shadow-masked substrates
  • Substrates Kapton-taped, or carbon-taped, to carrier wafers or slides
  • Samples mounted using Apiezon W high vacuum wax
  • Various substrate holder assemblies

Can mount samples at various angles from source

With extra setup time, can rotate samples at various deposition angles from source during run, at variable RPM (typically to get better sidewall coverage, but also for special purposes such as metallizing around a cylinder or into parabolic reflectors).

Have done rotating large cylinders, rotating fiber walls and tips, rotating cantilever AFM tip chips, multi-faceted tapered reflector assemblies, etc. 

With extra setup time, can do in-situ tilt changes of samples during run with 180-degree swing.

I will help with design or design/fabrication of specialized tooling for odd or unusual substrates.

List of evaporation sources, with typical thickness ranges
(inquire about atypical thicknesses or materials not listed):

Material Typical Thickness Range [A] Notes
Aluminum 0-10,000  
Boron   not well characterized
Calcium Fluoride 0-250  
Chromium 0-1,500  
Copper

0-10,000

 
Germanium 0-1,000  
Gold 0-10,000  extra materials usage charge
Indium 0-2,500  
Iridium 0-500 extra materials usage charge
Iron 0-2,500  
Magnesium   not well characterized
Magnesium Fluoride 0-250 done as a protective overcoat over fresh mirror coating
Magnesium Oxide 0-250 done as overcoat only
Manganese 0-500  
Molybdenum 0-1,000 refractory metal, goes down very hot
Nickel 0-2,500  
Niobium 0-1,000 refractory metal, goes down very hot
Palladium 0-800 extra materials usage charge
Platinum 0-800 extra materials usage charge
Rhenium   very limited supply
Silicon Monoxide 0-250 done as a protective overcoat over fresh mirror coating
Silicon Dioxide 0-250 done as a protective overcoat over fresh mirror coating
Silver 0-10,000  
Tantalum 0-1,000 refractory metal, goes down very hot
Tin

0-2,500

 
Titanium 0-2,500  
Titanium Dioxide 0-250 done as a protective overcoat over fresh mirror coating
Tungsten 0-1,000 refractory metal, goes down very hot

Contact Information

Tom Carver
650 723-1861

Getting Started

To have evaporations done for you as a service on this evaporator, you need to follow each of these steps in the order as listed here:

  1. Complete the process to become a lab member of SNSF and follow the instructions to activate a Badger account.
  2. Complete Axess STARS EHS-2470-WEB: COVID-19 Hygiene Best Practices.
  3. Arrange for a consultation by contacting Tom Carver.