Skip to main content Skip to secondary navigation
Operations During COVID-19

Deposition: Small Evaporator (Microfab Shop only)

Overview

Based on an extensively modified Veeco Instruments basic pumping station.

Key Features:

  • Typical runs pumped to mid 10^-7 Torr pressure range.
  • 4-pocket Airco Temescal e-gun.
  • CV-8 Airco Temescal power supply, 10KV, .8 amps maximum emission current.
  • Custom “Super Fine” emission current control for ultra fine tuning of emission current.
  • Inficon quartz crystal thickness monitor, with .01 Angstrom rate resolution.
  • Granville Phillips ion gauge, thermocouple gauges.
  • Varian Diffusion Pump.
  • Water-Cooled Chevron Baffle.
  • Liquid Nitrogen Cold Trap.
  • VAT Gate Valve.
  • Bake-able Molecular Sieve in Fore-Line.
  • Baratron capacitive manometer gauge to monitor mechanical pump.
  • Heated substrate holder (ambient to 269C) can do single 4”, two 3” wafers, or various smaller pieces. 
  • Typical source to substrate distance 10-11” (25.4cm to 27.94cm), but in special circumstances, as close as 7” to as far as 16”.
  • Can accommodate numerous sizes and types of substrates, including, but not limited to:
  • Single 6” wafer
  • Up to two 4” wafers
  • 4” and 5” squares (mask blanks)
  • Microscope slides and cover slips of all sizes
  • Up to five 3” wafers
  • Up to nine 2” wafers
  • Glass fibers
  • Odd shaped substrates
  • Small chips
  • Crystals
  • PZT transducers
  • Cylinders
  • Thin Polymer Films (PET, Kapton, etc.)
  • Shadow-masked substrates
  • Chips Kapton-taped, or carbon-taped, to slides or carrier wafers
  • Samples mounted using Apiezon W high vacuum wax
  • Various sample holder assemblies

Can mount samples at various angles. 

With extra set up time, can do in-situ tilt changes of samples during run with 180-degree swing.

I will help with design or design/fabrication of specialized tooling for odd or unusual substrates.

List of evaporation sources, with typical thickness ranges
(inquire about atypical thicknesses or materials not listed):

Material Typical Thickness Range [A] Notes
Aluminum 0-10,000  
Chromium 0-1,500  
Copper

0-10,000

 
Germanium 0-1,000  
Gold 0-10,000  extra materials usage charge
Indium 0-2,500  
Indium Tin Oxide 0-500   requires 320C anneal afterwards to turn clear
Iron 0-2,500  
Magnesium Fluoride 0-250 done as a protective overcoat over fresh mirror coating
Manganese 0-500  
Nickel 0-2,500  
Silicon Monoxide 0-250 done as a protective overcoat over fresh mirror coating
Silver 0-10,000  
Tin

0-2,500

 
Titanium 0-2,500  

Contact Information

Tom Carver
650 723-1861

Getting Started

To have evaporations done for you as a service on this evaporator, you need to follow each of these steps in the order as listed here:

  1. Complete the process to become a lab member of SNSF and follow the instructions to activate a Badger account.
  2. Complete the SNSF COVID-19 Authorization protocol and receive notification of authorization.
  3. Arrange for a consultation by contacting Tom Carver.