Deposition: Small Evaporator (Microfab Shop only)

Overview

Based on an extensively modified Veeco Instruments basic pumping station.

Key Features:

Typical runs pumped to mid 10^-7 Torr pressure range.
4-pocket Airco Temescal e-gun.
CV-8 Airco Temescal power supply, 10KV, .8 amps maximum emission current.
Custom “Super Fine” emission current control for ultra fine tuning of emission current.
Inficon quartz crystal thickness monitor, with .01 Angstrom rate resolution.
Granville Phillips ion gauge, thermocouple gauges.
Varian Diffusion Pump.
Water-Cooled Chevron Baffle.
Liquid Nitrogen Cold Trap.
VAT Gate Valve.
Bake-able Molecular Sieve in Fore-Line.
Baratron capacitive manometer gauge to monitor mechanical pump.
Heated substrate holder (ambient to 269C) can do single 4”, two 3” wafers, or various smaller pieces.
Typical source to substrate distance 10-11” (25.4cm to 27.94cm), but in special circumstances, as close as 7” to as far as 16”.
Can accommodate numerous sizes and types of substrates, including, but not limited to:
Single 6” wafer
Up to two 4” wafers
4” and 5” squares (mask blanks)
Microscope slides and cover slips of all sizes
Up to five 3” wafers
Up to nine 2” wafers
Glass fibers
Odd shaped substrates
Small chips
Crystals
PZT transducers
Cylinders
Thin Polymer Films (PET, Kapton, etc.)
Shadow-masked substrates
Chips Kapton-taped, or carbon-taped, to slides or carrier wafers
Samples mounted using Apiezon W high vacuum wax
Various sample holder assemblies

Can mount samples at various angles.

With extra set up time, can do in-situ tilt changes of samples during run with 180-degree swing.

I will help with design or design/fabrication of specialized tooling for odd or unusual substrates.

List of evaporation sources, with typical thickness ranges
(inquire about atypical thicknesses or materials not listed):

Material	Typical Thickness Range [A]	Notes
Aluminum	0-10,000
Chromium	0-1,500
Copper	0-10,000
Germanium	0-1,000
Gold	0-10,000	extra materials usage charge
Indium	0-2,500
Indium Tin Oxide	0-500	requires 320C anneal afterwards to turn clear
Iron	0-2,500
Magnesium Fluoride	0-250	done as a protective overcoat over fresh mirror coating
Manganese	0-500
Nickel	0-2,500
Silicon Monoxide	0-250	done as a protective overcoat over fresh mirror coating
Silver	0-10,000
Tin	0-2,500
Titanium	0-2,500

Tom Carver
650 723-1861

To have evaporations done for you as a service on this evaporator, you need to follow each of these steps in the order as listed here:

Complete the process to become a lab member of SNSF and follow the instructions to activate a Badger account.
Arrange for a consultation by contacting Tom Carver.