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Facilities & Equipment

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Student working with staff member at the JEOL electron beam lithography tool.


The Spilker building is home to our two cleanroom facilities, featuring electron beam lithography, deposition, etching and a range of other tools to enable nanofabrication.


Student working at Titan transmission electron microscope.

Electron & Ion Microscopy

The Electron & Ion Microscopy facilities feature some of the most advanced tools for Scanning Electron Micoscopy (SEM), Transmission Electron Microscopy (TEM) and Focused Ion Beam (FIB).

Lauren Riddiford, a graduate student in applied physics uses the XPS (x-ray photoelectron spectroscopy) tool by PHI, which is located in the McCullough building, room 112 and is part of Stanford Nano Shared Facilities. XPS gives quantitative elemental composition information on a wide variety of samples.

X-ray & Surface Analysis

At the core of the XSA facilities are X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), NanoSIMS and a range of other Scanning Probe Micoscopy capabilites.

At soft & sybrid materials

Soft & Hybrid Materials Facility

SMF is dedicated to fundamental research on interfaces found in systems containing polymers and low molecular weight amphiphiles.