Etch: Intlvac Ion Beam Mill Etcher
The Intlvac Nanoquest Research Ion Beam Milling System is a Versatile R&D platform. The ion beam processing is a controllable thin film etching technique with independent control of ion energy, ion current density, and incidence angle. Designed as a general purpose R&D tool, the Nanoquest I is capable of performing processes ranging from a simple etch to multi-angle, utilizing substrate rotation and substrate offset to achieve a superior etch. The Nanoquest System combines a 4 inch water-cooled, rotating stage, a Kaufman ion source, an easily accessible stainless steel vacuum chamber with Turbo Molecular pumping.
In order to become a qualified user of the Intlvac Ion Mill, you need to follow each of these steps in the order as listed here:
- Complete the process to become a lab member of SNSF and follow the instructions to activate a Badger account.
- Complete the SNSF COVID-19 Authorization protocol and receive notification of authorization.
- Complete the process to become a Flexible Cleanroom user.
- Contact firstname.lastname@example.org to get trained and qualified on the Ion Mill.