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Nanopatterning Cleanroom (NPC)

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The Nanopatterning Cleanroom (NPC) is an approximately 2000 square feet cleanroom facility and hosts the Raith EBPG 5200+ EBL systems, FEI Nova NanoSEM, KJL evaporators, Oxford reactive ion etcher, wet benches, optical microscopes and other supporting equipment. The cleanroom is located in the basement of the Spilker Building, suite 006. Lab users pay a daily fee when they want to access the lab. The fee is to cover costs such as cleanroom supplies, repairs and maintenance of equipment, gases, chemicals, cleanroom apparel, etc.

The following lists equipment available inside the cleanroom:

Visiting the Nanopatterning Cleanroom

Current, experienced Nanopatterning Cleanroom labmembers (users who have completed the lab safety tour) can request for permission to bring a visitor (individuals who have not completed the lab safety tour and been granted access to the Nanopatterning Cleanroom) into the cleanroom with them. If permission is granted, the NPC labmember will be responsible for the visitor’s safety and ensure that they follow all SNSF and NPC policies.

Both the visitor and the NPC labmember must jointly fill out the Visitor Request Form. Staff will email both the visitor and the NPC user notifying them on whether or not permission has been granted to the visitor to enter the cleanroom with their NPC labmember escort. It is recommended to submit the form at least a day in advance to allow time for staff to review the request.

Contact Information

Comments/Suggestion about the cleanroom can also be shared using this form.

Getting Started and Training Information

In order to become a qualified user of the Nanopatterning Cleanroom, you need to follow each of these steps in the order as listed here:

  1. Complete the process to become a lab member of SNSF and follow the instructions to activate a Badger account.
  2. Review the following documents:
  3. Pass (100%) and complete the Nanopatterning Cleanroom Safety Quiz and New User Intake Form.
    • This quiz and form is getting updated soon. For now, however, the recommended page numbers to refer to in the General Cleanroom Manual are likely incorrect. If you need assistance with the quiz in the meantime, please reach out to staff.
  4. Complete steps 1-3 in Getting Started and Training Information for the Wet Benches.
  5. Watch the Nanopatterning Cleanroom Virtual Lab Safety Tour video.
  6. Email to set up a time for a final in-person check-off meeting to walk through the cleanroom and go over any questions you have before granting you access to the cleanroom.
    • Note: After the final check-off meeting, you will be granted card key access. Only after you have full card key access to the lab, are you allowed to enter the lab and schedule training on the tools.
  7. After the check-off meeting, staff will email you to follow-up with a few forms you will need to complete, certifying that you will adhere to all the policies and guidelines as a lab member.
  8. Please see the respective tool webpages for training information.